7/23/2010	9:44:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/23/2010	9:44:49 AM	Recipe started at 9:44 AM
7/23/2010	9:44:49 AM	H2 valve closed
7/23/2010	9:44:49 AM	BCl3 valve closed
7/23/2010	9:44:49 AM	PH3 valve closed
7/23/2010	9:44:49 AM	SiCl4 pre valve closed
7/23/2010	9:44:49 AM	SiCl4 post valve closed
7/23/2010	9:44:49 AM	Main Vac valve closed
7/23/2010	9:44:49 AM	Bypass valve closed
7/23/2010	9:44:49 AM	Bubbler valve closed
7/23/2010	9:44:49 AM	Helium valve opened
7/23/2010	9:44:49 AM	Helium MFC set to  500.000000
7/23/2010	9:44:49 AM	H2 MFC set to  0.000000
7/23/2010	9:44:49 AM	BCl3 MFC set to  0.000000
7/23/2010	9:44:49 AM	PHl3 MFC set to  0.000000
7/23/2010	9:44:49 AM	SiCl4 MFC set to  0.000000
7/23/2010	9:44:49 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	9:44:49 AM	Tube furnace set to 0
7/23/2010	9:45:55 AM	Helium valve closed
7/23/2010	9:45:55 AM	H2 valve closed
7/23/2010	9:45:55 AM	BCl3 valve closed
7/23/2010	9:45:55 AM	PH3 valve closed
7/23/2010	9:45:55 AM	SiCl4 pre valve closed
7/23/2010	9:45:55 AM	SiCl4 post valve closed
7/23/2010	9:45:55 AM	Main Vac valve closed
7/23/2010	9:45:55 AM	Bypass valve closed
7/23/2010	9:45:55 AM	Bubbler valve closed
7/23/2010	9:45:55 AM	Helium MFC set to  0.000000
7/23/2010	9:45:55 AM	H2 MFC set to  0.000000
7/23/2010	9:45:55 AM	BCl3 MFC set to  0.000000
7/23/2010	9:45:55 AM	PHl3 MFC set to  0.000000
7/23/2010	9:45:55 AM	SiCl4 MFC set to  0.000000
7/23/2010	9:45:55 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	9:45:55 AM	Tube furnace set to 0
7/23/2010	9:45:56 AM	Run finished at 9:45 AM
7/23/2010	9:45:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/23/2010	9:59:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	9:59:23 AM	Recipe started at 9:59 AM
7/23/2010	9:59:23 AM	Helium valve closed
7/23/2010	9:59:23 AM	H2 valve closed
7/23/2010	9:59:23 AM	BCl3 valve closed
7/23/2010	9:59:23 AM	PH3 valve closed
7/23/2010	9:59:23 AM	SiCl4 pre valve closed
7/23/2010	9:59:23 AM	SiCl4 post valve closed
7/23/2010	9:59:23 AM	Main Vac valve closed
7/23/2010	9:59:23 AM	Bubbler valve closed
7/23/2010	9:59:23 AM	Bypass valve opened
7/23/2010	9:59:23 AM	Helium MFC set to  0.000000
7/23/2010	9:59:23 AM	H2 MFC set to  0.000000
7/23/2010	9:59:23 AM	BCl3 MFC set to  0.000000
7/23/2010	9:59:23 AM	PHl3 MFC set to  0.000000
7/23/2010	9:59:23 AM	SiCl4 MFC set to  0.000000
7/23/2010	9:59:23 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	9:59:23 AM	Tube furnace set to 0
7/23/2010	10:00:00 AM	Helium valve closed
7/23/2010	10:00:00 AM	H2 valve closed
7/23/2010	10:00:00 AM	BCl3 valve closed
7/23/2010	10:00:00 AM	PH3 valve closed
7/23/2010	10:00:00 AM	SiCl4 pre valve closed
7/23/2010	10:00:00 AM	SiCl4 post valve closed
7/23/2010	10:00:00 AM	Bubbler valve closed
7/23/2010	10:00:00 AM	Main Vac valve opened
7/23/2010	10:00:00 AM	Bypass valve opened
7/23/2010	10:00:00 AM	Helium MFC set to  0.000000
7/23/2010	10:00:00 AM	H2 MFC set to  0.000000
7/23/2010	10:00:00 AM	BCl3 MFC set to  0.000000
7/23/2010	10:00:00 AM	PHl3 MFC set to  0.000000
7/23/2010	10:00:00 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:00:00 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:00:00 AM	Tube furnace set to 0
7/23/2010	10:00:01 AM	Run finished at 10:00 AM
7/23/2010	10:00:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	10:00:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	10:00:37 AM	Recipe started at 10:00 AM
7/23/2010	10:00:37 AM	Helium valve closed
7/23/2010	10:00:37 AM	H2 valve closed
7/23/2010	10:00:37 AM	BCl3 valve closed
7/23/2010	10:00:37 AM	PH3 valve closed
7/23/2010	10:00:37 AM	SiCl4 pre valve closed
7/23/2010	10:00:37 AM	SiCl4 post valve closed
7/23/2010	10:00:37 AM	Main Vac valve closed
7/23/2010	10:00:37 AM	Bubbler valve closed
7/23/2010	10:00:37 AM	Bypass valve opened
7/23/2010	10:00:37 AM	Helium MFC set to  0.000000
7/23/2010	10:00:37 AM	H2 MFC set to  0.000000
7/23/2010	10:00:38 AM	BCl3 MFC set to  0.000000
7/23/2010	10:00:38 AM	PHl3 MFC set to  0.000000
7/23/2010	10:00:38 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:00:38 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:00:38 AM	Tube furnace set to 0
7/23/2010	10:00:38 AM	Helium valve closed
7/23/2010	10:00:38 AM	H2 valve closed
7/23/2010	10:00:38 AM	BCl3 valve closed
7/23/2010	10:00:38 AM	PH3 valve closed
7/23/2010	10:00:38 AM	SiCl4 pre valve closed
7/23/2010	10:00:38 AM	SiCl4 post valve closed
7/23/2010	10:00:38 AM	Bubbler valve closed
7/23/2010	10:00:38 AM	Main Vac valve opened
7/23/2010	10:00:38 AM	Bypass valve opened
7/23/2010	10:00:38 AM	Helium MFC set to  0.000000
7/23/2010	10:00:38 AM	H2 MFC set to  0.000000
7/23/2010	10:00:38 AM	BCl3 MFC set to  0.000000
7/23/2010	10:00:38 AM	PHl3 MFC set to  0.000000
7/23/2010	10:00:38 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:00:38 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:00:38 AM	Tube furnace set to 0
7/23/2010	10:01:38 AM	H2 valve closed
7/23/2010	10:01:38 AM	BCl3 valve closed
7/23/2010	10:01:38 AM	PH3 valve closed
7/23/2010	10:01:38 AM	SiCl4 pre valve closed
7/23/2010	10:01:38 AM	SiCl4 post valve closed
7/23/2010	10:01:38 AM	Bubbler valve closed
7/23/2010	10:01:38 AM	Helium valve opened
7/23/2010	10:01:38 AM	Main Vac valve opened
7/23/2010	10:01:38 AM	Bypass valve opened
7/23/2010	10:01:38 AM	Helium MFC set to  100.000000
7/23/2010	10:01:38 AM	H2 MFC set to  0.000000
7/23/2010	10:01:38 AM	BCl3 MFC set to  0.000000
7/23/2010	10:01:38 AM	PHl3 MFC set to  0.000000
7/23/2010	10:01:38 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:01:38 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:01:38 AM	Tube furnace set to 0
7/23/2010	10:10:38 AM	Helium valve closed
7/23/2010	10:10:38 AM	H2 valve closed
7/23/2010	10:10:38 AM	BCl3 valve closed
7/23/2010	10:10:38 AM	PH3 valve closed
7/23/2010	10:10:38 AM	SiCl4 pre valve closed
7/23/2010	10:10:38 AM	SiCl4 post valve closed
7/23/2010	10:10:38 AM	Bubbler valve closed
7/23/2010	10:10:38 AM	Main Vac valve opened
7/23/2010	10:10:38 AM	Bypass valve opened
7/23/2010	10:10:38 AM	Helium MFC set to  0.000000
7/23/2010	10:10:38 AM	H2 MFC set to  0.000000
7/23/2010	10:10:38 AM	BCl3 MFC set to  0.000000
7/23/2010	10:10:38 AM	PHl3 MFC set to  0.000000
7/23/2010	10:10:38 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:10:38 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:10:39 AM	Tube furnace set to 0
7/23/2010	10:11:39 AM	H2 valve closed
7/23/2010	10:11:39 AM	BCl3 valve closed
7/23/2010	10:11:39 AM	PH3 valve closed
7/23/2010	10:11:39 AM	SiCl4 pre valve closed
7/23/2010	10:11:39 AM	SiCl4 post valve closed
7/23/2010	10:11:39 AM	Bubbler valve closed
7/23/2010	10:11:39 AM	Helium valve opened
7/23/2010	10:11:39 AM	Main Vac valve opened
7/23/2010	10:11:39 AM	Bypass valve opened
7/23/2010	10:11:39 AM	Helium MFC set to  100.000000
7/23/2010	10:11:39 AM	H2 MFC set to  0.000000
7/23/2010	10:11:39 AM	BCl3 MFC set to  0.000000
7/23/2010	10:11:39 AM	PHl3 MFC set to  0.000000
7/23/2010	10:11:39 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:11:39 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:11:39 AM	Tube furnace set to 0
7/23/2010	10:20:39 AM	Helium valve closed
7/23/2010	10:20:39 AM	H2 valve closed
7/23/2010	10:20:39 AM	BCl3 valve closed
7/23/2010	10:20:39 AM	PH3 valve closed
7/23/2010	10:20:39 AM	SiCl4 pre valve closed
7/23/2010	10:20:39 AM	SiCl4 post valve closed
7/23/2010	10:20:39 AM	Bubbler valve closed
7/23/2010	10:20:39 AM	Main Vac valve opened
7/23/2010	10:20:39 AM	Bypass valve opened
7/23/2010	10:20:39 AM	Helium MFC set to  0.000000
7/23/2010	10:20:39 AM	H2 MFC set to  0.000000
7/23/2010	10:20:39 AM	BCl3 MFC set to  0.000000
7/23/2010	10:20:39 AM	PHl3 MFC set to  0.000000
7/23/2010	10:20:39 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:20:39 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:20:39 AM	Tube furnace set to 0
7/23/2010	10:21:39 AM	H2 valve closed
7/23/2010	10:21:39 AM	BCl3 valve closed
7/23/2010	10:21:39 AM	PH3 valve closed
7/23/2010	10:21:39 AM	SiCl4 pre valve closed
7/23/2010	10:21:39 AM	SiCl4 post valve closed
7/23/2010	10:21:39 AM	Bubbler valve closed
7/23/2010	10:21:39 AM	Helium valve opened
7/23/2010	10:21:39 AM	Main Vac valve opened
7/23/2010	10:21:39 AM	Bypass valve opened
7/23/2010	10:21:39 AM	Helium MFC set to  100.000000
7/23/2010	10:21:39 AM	H2 MFC set to  0.000000
7/23/2010	10:21:39 AM	BCl3 MFC set to  0.000000
7/23/2010	10:21:39 AM	PHl3 MFC set to  0.000000
7/23/2010	10:21:39 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:21:39 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:21:39 AM	Tube furnace set to 0
7/23/2010	10:30:39 AM	Helium valve closed
7/23/2010	10:30:39 AM	H2 valve closed
7/23/2010	10:30:39 AM	BCl3 valve closed
7/23/2010	10:30:39 AM	PH3 valve closed
7/23/2010	10:30:39 AM	SiCl4 pre valve closed
7/23/2010	10:30:39 AM	SiCl4 post valve closed
7/23/2010	10:30:39 AM	Bubbler valve closed
7/23/2010	10:30:39 AM	Main Vac valve opened
7/23/2010	10:30:39 AM	Bypass valve opened
7/23/2010	10:30:39 AM	Helium MFC set to  0.000000
7/23/2010	10:30:39 AM	H2 MFC set to  0.000000
7/23/2010	10:30:39 AM	BCl3 MFC set to  0.000000
7/23/2010	10:30:39 AM	PHl3 MFC set to  0.000000
7/23/2010	10:30:39 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:30:39 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:30:39 AM	Tube furnace set to 0
7/23/2010	10:30:40 AM	Run finished at 10:30 AM
7/23/2010	10:30:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	10:36:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	10:36:42 AM	Recipe started at 10:36 AM
7/23/2010	10:36:42 AM	Helium valve closed
7/23/2010	10:36:42 AM	H2 valve closed
7/23/2010	10:36:42 AM	BCl3 valve closed
7/23/2010	10:36:42 AM	PH3 valve closed
7/23/2010	10:36:42 AM	SiCl4 pre valve closed
7/23/2010	10:36:42 AM	SiCl4 post valve closed
7/23/2010	10:36:42 AM	Main Vac valve closed
7/23/2010	10:36:42 AM	Bubbler valve closed
7/23/2010	10:36:42 AM	Bypass valve opened
7/23/2010	10:36:42 AM	Helium MFC set to  0.000000
7/23/2010	10:36:42 AM	H2 MFC set to  0.000000
7/23/2010	10:36:42 AM	BCl3 MFC set to  0.000000
7/23/2010	10:36:42 AM	PHl3 MFC set to  0.000000
7/23/2010	10:36:42 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:36:42 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:36:42 AM	Tube furnace set to 0
7/23/2010	10:36:42 AM	Helium valve closed
7/23/2010	10:36:42 AM	H2 valve closed
7/23/2010	10:36:42 AM	BCl3 valve closed
7/23/2010	10:36:42 AM	PH3 valve closed
7/23/2010	10:36:42 AM	SiCl4 pre valve closed
7/23/2010	10:36:42 AM	SiCl4 post valve closed
7/23/2010	10:36:42 AM	Bubbler valve closed
7/23/2010	10:36:42 AM	Main Vac valve opened
7/23/2010	10:36:42 AM	Bypass valve opened
7/23/2010	10:36:42 AM	Helium MFC set to  0.000000
7/23/2010	10:36:42 AM	H2 MFC set to  0.000000
7/23/2010	10:36:42 AM	BCl3 MFC set to  0.000000
7/23/2010	10:36:42 AM	PHl3 MFC set to  0.000000
7/23/2010	10:36:42 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:36:42 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:36:43 AM	Tube furnace set to 0
7/23/2010	10:37:43 AM	H2 valve closed
7/23/2010	10:37:43 AM	BCl3 valve closed
7/23/2010	10:37:43 AM	PH3 valve closed
7/23/2010	10:37:43 AM	SiCl4 pre valve closed
7/23/2010	10:37:43 AM	SiCl4 post valve closed
7/23/2010	10:37:43 AM	Bubbler valve closed
7/23/2010	10:37:43 AM	Helium valve opened
7/23/2010	10:37:43 AM	Main Vac valve opened
7/23/2010	10:37:43 AM	Bypass valve opened
7/23/2010	10:37:43 AM	Helium MFC set to  100.000000
7/23/2010	10:37:43 AM	H2 MFC set to  0.000000
7/23/2010	10:37:43 AM	BCl3 MFC set to  0.000000
7/23/2010	10:37:43 AM	PHl3 MFC set to  0.000000
7/23/2010	10:37:43 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:37:43 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:37:43 AM	Tube furnace set to 0
7/23/2010	10:46:43 AM	Helium valve closed
7/23/2010	10:46:43 AM	H2 valve closed
7/23/2010	10:46:43 AM	BCl3 valve closed
7/23/2010	10:46:43 AM	PH3 valve closed
7/23/2010	10:46:43 AM	SiCl4 pre valve closed
7/23/2010	10:46:43 AM	SiCl4 post valve closed
7/23/2010	10:46:43 AM	Bubbler valve closed
7/23/2010	10:46:43 AM	Main Vac valve opened
7/23/2010	10:46:43 AM	Bypass valve opened
7/23/2010	10:46:43 AM	Helium MFC set to  0.000000
7/23/2010	10:46:43 AM	H2 MFC set to  0.000000
7/23/2010	10:46:43 AM	BCl3 MFC set to  0.000000
7/23/2010	10:46:43 AM	PHl3 MFC set to  0.000000
7/23/2010	10:46:43 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:46:43 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:46:43 AM	Tube furnace set to 0
7/23/2010	10:47:43 AM	H2 valve closed
7/23/2010	10:47:43 AM	BCl3 valve closed
7/23/2010	10:47:43 AM	PH3 valve closed
7/23/2010	10:47:43 AM	SiCl4 pre valve closed
7/23/2010	10:47:43 AM	SiCl4 post valve closed
7/23/2010	10:47:43 AM	Bubbler valve closed
7/23/2010	10:47:43 AM	Helium valve opened
7/23/2010	10:47:43 AM	Main Vac valve opened
7/23/2010	10:47:43 AM	Bypass valve opened
7/23/2010	10:47:43 AM	Helium MFC set to  100.000000
7/23/2010	10:47:43 AM	H2 MFC set to  0.000000
7/23/2010	10:47:43 AM	BCl3 MFC set to  0.000000
7/23/2010	10:47:43 AM	PHl3 MFC set to  0.000000
7/23/2010	10:47:43 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:47:43 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:47:43 AM	Tube furnace set to 0
7/23/2010	10:56:43 AM	Helium valve closed
7/23/2010	10:56:43 AM	H2 valve closed
7/23/2010	10:56:43 AM	BCl3 valve closed
7/23/2010	10:56:43 AM	PH3 valve closed
7/23/2010	10:56:43 AM	SiCl4 pre valve closed
7/23/2010	10:56:43 AM	SiCl4 post valve closed
7/23/2010	10:56:43 AM	Bubbler valve closed
7/23/2010	10:56:43 AM	Main Vac valve opened
7/23/2010	10:56:43 AM	Bypass valve opened
7/23/2010	10:56:43 AM	Helium MFC set to  0.000000
7/23/2010	10:56:43 AM	H2 MFC set to  0.000000
7/23/2010	10:56:43 AM	BCl3 MFC set to  0.000000
7/23/2010	10:56:43 AM	PHl3 MFC set to  0.000000
7/23/2010	10:56:43 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:56:43 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:56:43 AM	Tube furnace set to 0
7/23/2010	10:57:43 AM	H2 valve closed
7/23/2010	10:57:43 AM	BCl3 valve closed
7/23/2010	10:57:43 AM	PH3 valve closed
7/23/2010	10:57:43 AM	SiCl4 pre valve closed
7/23/2010	10:57:43 AM	SiCl4 post valve closed
7/23/2010	10:57:43 AM	Bubbler valve closed
7/23/2010	10:57:43 AM	Helium valve opened
7/23/2010	10:57:43 AM	Main Vac valve opened
7/23/2010	10:57:43 AM	Bypass valve opened
7/23/2010	10:57:43 AM	Helium MFC set to  100.000000
7/23/2010	10:57:43 AM	H2 MFC set to  0.000000
7/23/2010	10:57:43 AM	BCl3 MFC set to  0.000000
7/23/2010	10:57:43 AM	PHl3 MFC set to  0.000000
7/23/2010	10:57:43 AM	SiCl4 MFC set to  0.000000
7/23/2010	10:57:43 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	10:57:44 AM	Tube furnace set to 0
7/23/2010	11:06:44 AM	Helium valve closed
7/23/2010	11:06:44 AM	H2 valve closed
7/23/2010	11:06:44 AM	BCl3 valve closed
7/23/2010	11:06:44 AM	PH3 valve closed
7/23/2010	11:06:44 AM	SiCl4 pre valve closed
7/23/2010	11:06:44 AM	SiCl4 post valve closed
7/23/2010	11:06:44 AM	Bubbler valve closed
7/23/2010	11:06:44 AM	Main Vac valve opened
7/23/2010	11:06:44 AM	Bypass valve opened
7/23/2010	11:06:44 AM	Helium MFC set to  0.000000
7/23/2010	11:06:44 AM	H2 MFC set to  0.000000
7/23/2010	11:06:44 AM	BCl3 MFC set to  0.000000
7/23/2010	11:06:44 AM	PHl3 MFC set to  0.000000
7/23/2010	11:06:44 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:06:44 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:06:44 AM	Tube furnace set to 0
7/23/2010	11:06:45 AM	Run finished at 11:06 AM
7/23/2010	11:06:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	11:09:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	11:09:49 AM	Recipe started at 11:09 AM
7/23/2010	11:09:49 AM	Helium valve closed
7/23/2010	11:09:49 AM	H2 valve closed
7/23/2010	11:09:49 AM	BCl3 valve closed
7/23/2010	11:09:49 AM	PH3 valve closed
7/23/2010	11:09:49 AM	SiCl4 pre valve closed
7/23/2010	11:09:49 AM	SiCl4 post valve closed
7/23/2010	11:09:49 AM	Main Vac valve closed
7/23/2010	11:09:49 AM	Bubbler valve closed
7/23/2010	11:09:49 AM	Bypass valve opened
7/23/2010	11:09:49 AM	Helium MFC set to  0.000000
7/23/2010	11:09:49 AM	H2 MFC set to  0.000000
7/23/2010	11:09:49 AM	BCl3 MFC set to  0.000000
7/23/2010	11:09:49 AM	PHl3 MFC set to  0.000000
7/23/2010	11:09:49 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:09:49 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:09:49 AM	Tube furnace set to 0
7/23/2010	11:09:50 AM	Helium valve closed
7/23/2010	11:09:50 AM	H2 valve closed
7/23/2010	11:09:50 AM	BCl3 valve closed
7/23/2010	11:09:50 AM	PH3 valve closed
7/23/2010	11:09:50 AM	SiCl4 pre valve closed
7/23/2010	11:09:50 AM	SiCl4 post valve closed
7/23/2010	11:09:50 AM	Bubbler valve closed
7/23/2010	11:09:50 AM	Main Vac valve opened
7/23/2010	11:09:50 AM	Bypass valve opened
7/23/2010	11:09:50 AM	Helium MFC set to  0.000000
7/23/2010	11:09:50 AM	H2 MFC set to  0.000000
7/23/2010	11:09:50 AM	BCl3 MFC set to  0.000000
7/23/2010	11:09:50 AM	PHl3 MFC set to  0.000000
7/23/2010	11:09:50 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:09:50 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:09:50 AM	Tube furnace set to 0
7/23/2010	11:10:30 AM	Run aborted at 11:10 AM
7/23/2010	11:10:30 AM	Helium valve closed
7/23/2010	11:10:30 AM	H2 valve closed
7/23/2010	11:10:30 AM	BCl3 valve closed
7/23/2010	11:10:30 AM	PH3 valve closed
7/23/2010	11:10:30 AM	SiCl4 pre valve closed
7/23/2010	11:10:30 AM	SiCl4 post valve closed
7/23/2010	11:10:30 AM	Bypass valve closed
7/23/2010	11:10:30 AM	Main Vac valve closed
7/23/2010	11:10:30 AM	Bubbler valve closed
7/23/2010	11:10:30 AM	Helium MFC set to  0.000000
7/23/2010	11:10:30 AM	H2 MFC set to  0.000000
7/23/2010	11:10:30 AM	BCl3 MFC set to  0.000000
7/23/2010	11:10:30 AM	PHl3 MFC set to  0.000000
7/23/2010	11:10:30 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:10:30 AM	Tube furnace set to 0
7/23/2010	11:10:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	11:10:51 AM	Helium MFC set to  100.000000
7/23/2010	11:10:52 AM	Helium valve opened
7/23/2010	11:11:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	11:11:59 AM	Recipe started at 11:11 AM
7/23/2010	11:11:59 AM	Helium valve closed
7/23/2010	11:11:59 AM	H2 valve closed
7/23/2010	11:11:59 AM	BCl3 valve closed
7/23/2010	11:11:59 AM	PH3 valve closed
7/23/2010	11:11:59 AM	SiCl4 pre valve closed
7/23/2010	11:11:59 AM	SiCl4 post valve closed
7/23/2010	11:11:59 AM	Main Vac valve closed
7/23/2010	11:11:59 AM	Bubbler valve closed
7/23/2010	11:11:59 AM	Bypass valve opened
7/23/2010	11:11:59 AM	Helium MFC set to  0.000000
7/23/2010	11:11:59 AM	H2 MFC set to  0.000000
7/23/2010	11:11:59 AM	BCl3 MFC set to  0.000000
7/23/2010	11:11:59 AM	PHl3 MFC set to  0.000000
7/23/2010	11:11:59 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:11:59 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:11:59 AM	Tube furnace set to 0
7/23/2010	11:12:11 AM	Helium valve closed
7/23/2010	11:12:11 AM	H2 valve closed
7/23/2010	11:12:11 AM	BCl3 valve closed
7/23/2010	11:12:11 AM	PH3 valve closed
7/23/2010	11:12:11 AM	SiCl4 pre valve closed
7/23/2010	11:12:11 AM	SiCl4 post valve closed
7/23/2010	11:12:11 AM	Bubbler valve closed
7/23/2010	11:12:11 AM	Main Vac valve opened
7/23/2010	11:12:11 AM	Bypass valve opened
7/23/2010	11:12:11 AM	Helium MFC set to  0.000000
7/23/2010	11:12:11 AM	H2 MFC set to  0.000000
7/23/2010	11:12:11 AM	BCl3 MFC set to  0.000000
7/23/2010	11:12:11 AM	PHl3 MFC set to  0.000000
7/23/2010	11:12:11 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:12:11 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:12:11 AM	Tube furnace set to 0
7/23/2010	11:12:12 AM	Run finished at 11:12 AM
7/23/2010	11:12:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	11:12:22 AM	Helium MFC set to  100.000000
7/23/2010	11:12:56 AM	Helium valve opened
7/23/2010	11:14:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	11:14:32 AM	Recipe started at 11:14 AM
7/23/2010	11:14:32 AM	Helium valve closed
7/23/2010	11:14:32 AM	H2 valve closed
7/23/2010	11:14:32 AM	BCl3 valve closed
7/23/2010	11:14:32 AM	PH3 valve closed
7/23/2010	11:14:32 AM	SiCl4 pre valve closed
7/23/2010	11:14:32 AM	SiCl4 post valve closed
7/23/2010	11:14:32 AM	Main Vac valve closed
7/23/2010	11:14:32 AM	Bubbler valve closed
7/23/2010	11:14:32 AM	Bypass valve opened
7/23/2010	11:14:32 AM	Helium MFC set to  0.000000
7/23/2010	11:14:32 AM	H2 MFC set to  0.000000
7/23/2010	11:14:32 AM	BCl3 MFC set to  0.000000
7/23/2010	11:14:32 AM	PHl3 MFC set to  0.000000
7/23/2010	11:14:32 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:14:32 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:14:32 AM	Tube furnace set to 0
7/23/2010	11:14:33 AM	Helium valve closed
7/23/2010	11:14:33 AM	H2 valve closed
7/23/2010	11:14:33 AM	BCl3 valve closed
7/23/2010	11:14:33 AM	PH3 valve closed
7/23/2010	11:14:33 AM	SiCl4 pre valve closed
7/23/2010	11:14:33 AM	SiCl4 post valve closed
7/23/2010	11:14:33 AM	Bubbler valve closed
7/23/2010	11:14:33 AM	Main Vac valve opened
7/23/2010	11:14:33 AM	Bypass valve opened
7/23/2010	11:14:33 AM	Helium MFC set to  0.000000
7/23/2010	11:14:33 AM	H2 MFC set to  0.000000
7/23/2010	11:14:33 AM	BCl3 MFC set to  0.000000
7/23/2010	11:14:33 AM	PHl3 MFC set to  0.000000
7/23/2010	11:14:33 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:14:33 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:14:33 AM	Tube furnace set to 0
7/23/2010	11:14:33 AM	Run finished at 11:14 AM
7/23/2010	11:14:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	11:15:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/23/2010	11:15:30 AM	Recipe started at 11:15 AM
7/23/2010	11:15:30 AM	Helium valve closed
7/23/2010	11:15:30 AM	H2 valve closed
7/23/2010	11:15:30 AM	BCl3 valve closed
7/23/2010	11:15:30 AM	PH3 valve closed
7/23/2010	11:15:30 AM	SiCl4 pre valve closed
7/23/2010	11:15:30 AM	SiCl4 post valve closed
7/23/2010	11:15:30 AM	Main Vac valve closed
7/23/2010	11:15:30 AM	Bypass valve closed
7/23/2010	11:15:30 AM	Bubbler valve closed
7/23/2010	11:15:30 AM	Helium MFC set to  0.000000
7/23/2010	11:15:30 AM	H2 MFC set to  0.000000
7/23/2010	11:15:30 AM	BCl3 MFC set to  0.000000
7/23/2010	11:15:30 AM	PHl3 MFC set to  0.000000
7/23/2010	11:15:30 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:15:30 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:15:30 AM	Tube furnace set to 0
7/23/2010	11:15:31 AM	Run finished at 11:15 AM
7/23/2010	11:15:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/23/2010	11:15:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	11:15:41 AM	Recipe started at 11:15 AM
7/23/2010	11:15:41 AM	Helium valve closed
7/23/2010	11:15:41 AM	H2 valve closed
7/23/2010	11:15:41 AM	BCl3 valve closed
7/23/2010	11:15:41 AM	PH3 valve closed
7/23/2010	11:15:41 AM	SiCl4 pre valve closed
7/23/2010	11:15:41 AM	SiCl4 post valve closed
7/23/2010	11:15:41 AM	Main Vac valve closed
7/23/2010	11:15:41 AM	Bubbler valve closed
7/23/2010	11:15:41 AM	Bypass valve opened
7/23/2010	11:15:41 AM	Helium MFC set to  0.000000
7/23/2010	11:15:41 AM	H2 MFC set to  0.000000
7/23/2010	11:15:41 AM	BCl3 MFC set to  0.000000
7/23/2010	11:15:41 AM	PHl3 MFC set to  0.000000
7/23/2010	11:15:41 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:15:41 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:15:41 AM	Tube furnace set to 0
7/23/2010	11:15:41 AM	Helium valve closed
7/23/2010	11:15:41 AM	H2 valve closed
7/23/2010	11:15:41 AM	BCl3 valve closed
7/23/2010	11:15:41 AM	PH3 valve closed
7/23/2010	11:15:41 AM	SiCl4 pre valve closed
7/23/2010	11:15:41 AM	SiCl4 post valve closed
7/23/2010	11:15:41 AM	Bubbler valve closed
7/23/2010	11:15:41 AM	Main Vac valve opened
7/23/2010	11:15:41 AM	Bypass valve opened
7/23/2010	11:15:41 AM	Helium MFC set to  0.000000
7/23/2010	11:15:41 AM	H2 MFC set to  0.000000
7/23/2010	11:15:41 AM	BCl3 MFC set to  0.000000
7/23/2010	11:15:41 AM	PHl3 MFC set to  0.000000
7/23/2010	11:15:41 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:15:41 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:15:41 AM	Tube furnace set to 0
7/23/2010	11:15:42 AM	Run finished at 11:15 AM
7/23/2010	11:15:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	11:16:31 AM	Recipe started at 11:16 AM
7/23/2010	11:16:31 AM	Helium valve closed
7/23/2010	11:16:31 AM	BCl3 valve closed
7/23/2010	11:16:31 AM	PH3 valve closed
7/23/2010	11:16:31 AM	SiCl4 pre valve closed
7/23/2010	11:16:31 AM	SiCl4 post valve closed
7/23/2010	11:16:31 AM	Main Vac valve closed
7/23/2010	11:16:31 AM	Bypass valve closed
7/23/2010	11:16:31 AM	Bubbler valve closed
7/23/2010	11:16:31 AM	H2 valve opened
7/23/2010	11:16:31 AM	Helium MFC set to  0.000000
7/23/2010	11:16:31 AM	H2 MFC set to  500.000000
7/23/2010	11:16:31 AM	BCl3 MFC set to  0.000000
7/23/2010	11:16:31 AM	PHl3 MFC set to  0.000000
7/23/2010	11:16:31 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:16:31 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:16:31 AM	Tube furnace set to 1000
7/23/2010	11:17:54 AM	Helium valve closed
7/23/2010	11:17:54 AM	BCl3 valve closed
7/23/2010	11:17:54 AM	PH3 valve closed
7/23/2010	11:17:54 AM	SiCl4 pre valve closed
7/23/2010	11:17:54 AM	SiCl4 post valve closed
7/23/2010	11:17:54 AM	Main Vac valve closed
7/23/2010	11:17:54 AM	Bypass valve closed
7/23/2010	11:17:54 AM	H2 valve opened
7/23/2010	11:17:54 AM	Bubbler valve opened
7/23/2010	11:17:54 AM	Helium MFC set to  0.000000
7/23/2010	11:17:54 AM	H2 MFC set to  500.000000
7/23/2010	11:17:54 AM	BCl3 MFC set to  0.000000
7/23/2010	11:17:54 AM	PHl3 MFC set to  0.000000
7/23/2010	11:17:54 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:17:54 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:17:54 AM	Tube furnace set to 1000
7/23/2010	11:37:54 AM	Helium valve closed
7/23/2010	11:37:54 AM	PH3 valve closed
7/23/2010	11:37:54 AM	Main Vac valve closed
7/23/2010	11:37:54 AM	Bypass valve closed
7/23/2010	11:37:54 AM	H2 valve opened
7/23/2010	11:37:54 AM	BCl3 valve opened
7/23/2010	11:37:54 AM	SiCl4 pre valve opened
7/23/2010	11:37:54 AM	SiCl4 post valve opened
7/23/2010	11:37:54 AM	Bubbler valve opened
7/23/2010	11:37:54 AM	Helium MFC set to  0.000000
7/23/2010	11:37:54 AM	H2 MFC set to  500.000000
7/23/2010	11:37:54 AM	BCl3 MFC set to  35.000000
7/23/2010	11:37:54 AM	PHl3 MFC set to  0.000000
7/23/2010	11:37:54 AM	SiCl4 MFC set to  50.000000
7/23/2010	11:37:54 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:37:54 AM	Tube furnace set to 1000
7/23/2010	11:47:54 AM	Helium valve closed
7/23/2010	11:47:54 AM	BCl3 valve closed
7/23/2010	11:47:54 AM	PH3 valve closed
7/23/2010	11:47:54 AM	SiCl4 pre valve closed
7/23/2010	11:47:54 AM	SiCl4 post valve closed
7/23/2010	11:47:54 AM	Main Vac valve closed
7/23/2010	11:47:54 AM	Bypass valve closed
7/23/2010	11:47:54 AM	H2 valve opened
7/23/2010	11:47:54 AM	Bubbler valve opened
7/23/2010	11:47:54 AM	Helium MFC set to  0.000000
7/23/2010	11:47:54 AM	H2 MFC set to  500.000000
7/23/2010	11:47:54 AM	BCl3 MFC set to  0.000000
7/23/2010	11:47:54 AM	PHl3 MFC set to  0.000000
7/23/2010	11:47:54 AM	SiCl4 MFC set to  0.000000
7/23/2010	11:47:54 AM	Bypass solenoid MFC set to  0.000000
7/23/2010	11:47:54 AM	Tube furnace set to 750
7/23/2010	12:07:54 PM	H2 valve closed
7/23/2010	12:07:54 PM	BCl3 valve closed
7/23/2010	12:07:54 PM	PH3 valve closed
7/23/2010	12:07:54 PM	SiCl4 pre valve closed
7/23/2010	12:07:54 PM	SiCl4 post valve closed
7/23/2010	12:07:54 PM	Main Vac valve closed
7/23/2010	12:07:54 PM	Bypass valve closed
7/23/2010	12:07:54 PM	Helium valve opened
7/23/2010	12:07:54 PM	Bubbler valve opened
7/23/2010	12:07:54 PM	Helium MFC set to  500.000000
7/23/2010	12:07:54 PM	H2 MFC set to  0.000000
7/23/2010	12:07:54 PM	BCl3 MFC set to  0.000000
7/23/2010	12:07:54 PM	PHl3 MFC set to  0.000000
7/23/2010	12:07:54 PM	SiCl4 MFC set to  0.000000
7/23/2010	12:07:54 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	12:07:54 PM	Tube furnace set to 0
7/23/2010	12:27:54 PM	Helium valve closed
7/23/2010	12:27:54 PM	H2 valve closed
7/23/2010	12:27:54 PM	BCl3 valve closed
7/23/2010	12:27:54 PM	PH3 valve closed
7/23/2010	12:27:54 PM	SiCl4 pre valve closed
7/23/2010	12:27:54 PM	SiCl4 post valve closed
7/23/2010	12:27:54 PM	Main Vac valve closed
7/23/2010	12:27:54 PM	Bypass valve closed
7/23/2010	12:27:54 PM	Bubbler valve closed
7/23/2010	12:27:54 PM	Helium MFC set to  0.000000
7/23/2010	12:27:54 PM	H2 MFC set to  0.000000
7/23/2010	12:27:54 PM	BCl3 MFC set to  0.000000
7/23/2010	12:27:54 PM	PHl3 MFC set to  0.000000
7/23/2010	12:27:54 PM	SiCl4 MFC set to  0.000000
7/23/2010	12:27:54 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	12:27:54 PM	Tube furnace set to 0
7/23/2010	12:27:55 PM	Run finished at 12:27 PM
7/23/2010	1:27:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	1:27:26 PM	Recipe started at 1:27 PM
7/23/2010	1:27:26 PM	Helium valve closed
7/23/2010	1:27:26 PM	H2 valve closed
7/23/2010	1:27:26 PM	BCl3 valve closed
7/23/2010	1:27:26 PM	PH3 valve closed
7/23/2010	1:27:26 PM	SiCl4 pre valve closed
7/23/2010	1:27:26 PM	SiCl4 post valve closed
7/23/2010	1:27:26 PM	Main Vac valve closed
7/23/2010	1:27:26 PM	Bubbler valve closed
7/23/2010	1:27:26 PM	Bypass valve opened
7/23/2010	1:27:26 PM	Helium MFC set to  0.000000
7/23/2010	1:27:26 PM	H2 MFC set to  0.000000
7/23/2010	1:27:26 PM	BCl3 MFC set to  0.000000
7/23/2010	1:27:26 PM	PHl3 MFC set to  0.000000
7/23/2010	1:27:26 PM	SiCl4 MFC set to  0.000000
7/23/2010	1:27:26 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	1:27:26 PM	Tube furnace set to 0
7/23/2010	1:28:03 PM	Helium valve closed
7/23/2010	1:28:03 PM	H2 valve closed
7/23/2010	1:28:03 PM	BCl3 valve closed
7/23/2010	1:28:03 PM	PH3 valve closed
7/23/2010	1:28:03 PM	SiCl4 pre valve closed
7/23/2010	1:28:03 PM	SiCl4 post valve closed
7/23/2010	1:28:03 PM	Bubbler valve closed
7/23/2010	1:28:03 PM	Main Vac valve opened
7/23/2010	1:28:03 PM	Bypass valve opened
7/23/2010	1:28:03 PM	Helium MFC set to  0.000000
7/23/2010	1:28:03 PM	H2 MFC set to  0.000000
7/23/2010	1:28:03 PM	BCl3 MFC set to  0.000000
7/23/2010	1:28:03 PM	PHl3 MFC set to  0.000000
7/23/2010	1:28:03 PM	SiCl4 MFC set to  0.000000
7/23/2010	1:28:03 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	1:28:03 PM	Tube furnace set to 0
7/23/2010	1:29:03 PM	H2 valve closed
7/23/2010	1:29:03 PM	BCl3 valve closed
7/23/2010	1:29:03 PM	PH3 valve closed
7/23/2010	1:29:03 PM	SiCl4 pre valve closed
7/23/2010	1:29:03 PM	SiCl4 post valve closed
7/23/2010	1:29:03 PM	Bubbler valve closed
7/23/2010	1:29:03 PM	Helium valve opened
7/23/2010	1:29:03 PM	Main Vac valve opened
7/23/2010	1:29:03 PM	Bypass valve opened
7/23/2010	1:29:03 PM	Helium MFC set to  100.000000
7/23/2010	1:29:03 PM	H2 MFC set to  0.000000
7/23/2010	1:29:03 PM	BCl3 MFC set to  0.000000
7/23/2010	1:29:03 PM	PHl3 MFC set to  0.000000
7/23/2010	1:29:03 PM	SiCl4 MFC set to  0.000000
7/23/2010	1:29:03 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	1:29:03 PM	Tube furnace set to 0
7/23/2010	1:38:03 PM	Helium valve closed
7/23/2010	1:38:03 PM	H2 valve closed
7/23/2010	1:38:03 PM	BCl3 valve closed
7/23/2010	1:38:03 PM	PH3 valve closed
7/23/2010	1:38:03 PM	SiCl4 pre valve closed
7/23/2010	1:38:03 PM	SiCl4 post valve closed
7/23/2010	1:38:03 PM	Bubbler valve closed
7/23/2010	1:38:03 PM	Main Vac valve opened
7/23/2010	1:38:03 PM	Bypass valve opened
7/23/2010	1:38:03 PM	Helium MFC set to  0.000000
7/23/2010	1:38:03 PM	H2 MFC set to  0.000000
7/23/2010	1:38:03 PM	BCl3 MFC set to  0.000000
7/23/2010	1:38:03 PM	PHl3 MFC set to  0.000000
7/23/2010	1:38:03 PM	SiCl4 MFC set to  0.000000
7/23/2010	1:38:03 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	1:38:03 PM	Tube furnace set to 0
7/23/2010	1:39:03 PM	H2 valve closed
7/23/2010	1:39:03 PM	BCl3 valve closed
7/23/2010	1:39:03 PM	PH3 valve closed
7/23/2010	1:39:03 PM	SiCl4 pre valve closed
7/23/2010	1:39:03 PM	SiCl4 post valve closed
7/23/2010	1:39:03 PM	Bubbler valve closed
7/23/2010	1:39:03 PM	Helium valve opened
7/23/2010	1:39:03 PM	Main Vac valve opened
7/23/2010	1:39:03 PM	Bypass valve opened
7/23/2010	1:39:03 PM	Helium MFC set to  100.000000
7/23/2010	1:39:03 PM	H2 MFC set to  0.000000
7/23/2010	1:39:03 PM	BCl3 MFC set to  0.000000
7/23/2010	1:39:03 PM	PHl3 MFC set to  0.000000
7/23/2010	1:39:03 PM	SiCl4 MFC set to  0.000000
7/23/2010	1:39:03 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	1:39:04 PM	Tube furnace set to 0
7/23/2010	1:48:04 PM	Helium valve closed
7/23/2010	1:48:04 PM	H2 valve closed
7/23/2010	1:48:04 PM	BCl3 valve closed
7/23/2010	1:48:04 PM	PH3 valve closed
7/23/2010	1:48:04 PM	SiCl4 pre valve closed
7/23/2010	1:48:04 PM	SiCl4 post valve closed
7/23/2010	1:48:04 PM	Bubbler valve closed
7/23/2010	1:48:04 PM	Main Vac valve opened
7/23/2010	1:48:04 PM	Bypass valve opened
7/23/2010	1:48:04 PM	Helium MFC set to  0.000000
7/23/2010	1:48:04 PM	H2 MFC set to  0.000000
7/23/2010	1:48:04 PM	BCl3 MFC set to  0.000000
7/23/2010	1:48:04 PM	PHl3 MFC set to  0.000000
7/23/2010	1:48:04 PM	SiCl4 MFC set to  0.000000
7/23/2010	1:48:04 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	1:48:04 PM	Tube furnace set to 0
7/23/2010	1:49:04 PM	H2 valve closed
7/23/2010	1:49:04 PM	BCl3 valve closed
7/23/2010	1:49:04 PM	PH3 valve closed
7/23/2010	1:49:04 PM	SiCl4 pre valve closed
7/23/2010	1:49:04 PM	SiCl4 post valve closed
7/23/2010	1:49:04 PM	Bubbler valve closed
7/23/2010	1:49:04 PM	Helium valve opened
7/23/2010	1:49:04 PM	Main Vac valve opened
7/23/2010	1:49:04 PM	Bypass valve opened
7/23/2010	1:49:04 PM	Helium MFC set to  100.000000
7/23/2010	1:49:04 PM	H2 MFC set to  0.000000
7/23/2010	1:49:04 PM	BCl3 MFC set to  0.000000
7/23/2010	1:49:04 PM	PHl3 MFC set to  0.000000
7/23/2010	1:49:04 PM	SiCl4 MFC set to  0.000000
7/23/2010	1:49:04 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	1:49:04 PM	Tube furnace set to 0
7/23/2010	1:58:04 PM	Helium valve closed
7/23/2010	1:58:04 PM	H2 valve closed
7/23/2010	1:58:04 PM	BCl3 valve closed
7/23/2010	1:58:04 PM	PH3 valve closed
7/23/2010	1:58:04 PM	SiCl4 pre valve closed
7/23/2010	1:58:04 PM	SiCl4 post valve closed
7/23/2010	1:58:04 PM	Bubbler valve closed
7/23/2010	1:58:04 PM	Main Vac valve opened
7/23/2010	1:58:04 PM	Bypass valve opened
7/23/2010	1:58:04 PM	Helium MFC set to  0.000000
7/23/2010	1:58:04 PM	H2 MFC set to  0.000000
7/23/2010	1:58:04 PM	BCl3 MFC set to  0.000000
7/23/2010	1:58:04 PM	PHl3 MFC set to  0.000000
7/23/2010	1:58:04 PM	SiCl4 MFC set to  0.000000
7/23/2010	1:58:04 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	1:58:04 PM	Tube furnace set to 0
7/23/2010	1:58:05 PM	Run finished at 1:58 PM
7/23/2010	1:58:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	2:02:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	2:02:30 PM	Recipe started at 2:02 PM
7/23/2010	2:02:30 PM	Helium valve closed
7/23/2010	2:02:30 PM	H2 valve closed
7/23/2010	2:02:30 PM	BCl3 valve closed
7/23/2010	2:02:30 PM	PH3 valve closed
7/23/2010	2:02:30 PM	SiCl4 pre valve closed
7/23/2010	2:02:30 PM	SiCl4 post valve closed
7/23/2010	2:02:30 PM	Main Vac valve closed
7/23/2010	2:02:30 PM	Bubbler valve closed
7/23/2010	2:02:30 PM	Bypass valve opened
7/23/2010	2:02:30 PM	Helium MFC set to  0.000000
7/23/2010	2:02:30 PM	H2 MFC set to  0.000000
7/23/2010	2:02:30 PM	BCl3 MFC set to  0.000000
7/23/2010	2:02:30 PM	PHl3 MFC set to  0.000000
7/23/2010	2:02:30 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:02:30 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:02:30 PM	Tube furnace set to 0
7/23/2010	2:02:30 PM	Helium valve closed
7/23/2010	2:02:30 PM	H2 valve closed
7/23/2010	2:02:30 PM	BCl3 valve closed
7/23/2010	2:02:30 PM	PH3 valve closed
7/23/2010	2:02:30 PM	SiCl4 pre valve closed
7/23/2010	2:02:30 PM	SiCl4 post valve closed
7/23/2010	2:02:30 PM	Bubbler valve closed
7/23/2010	2:02:30 PM	Main Vac valve opened
7/23/2010	2:02:30 PM	Bypass valve opened
7/23/2010	2:02:30 PM	Helium MFC set to  0.000000
7/23/2010	2:02:30 PM	H2 MFC set to  0.000000
7/23/2010	2:02:30 PM	BCl3 MFC set to  0.000000
7/23/2010	2:02:30 PM	PHl3 MFC set to  0.000000
7/23/2010	2:02:30 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:02:30 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:02:30 PM	Tube furnace set to 0
7/23/2010	2:03:30 PM	H2 valve closed
7/23/2010	2:03:30 PM	BCl3 valve closed
7/23/2010	2:03:30 PM	PH3 valve closed
7/23/2010	2:03:30 PM	SiCl4 pre valve closed
7/23/2010	2:03:30 PM	SiCl4 post valve closed
7/23/2010	2:03:30 PM	Bubbler valve closed
7/23/2010	2:03:30 PM	Helium valve opened
7/23/2010	2:03:30 PM	Main Vac valve opened
7/23/2010	2:03:30 PM	Bypass valve opened
7/23/2010	2:03:30 PM	Helium MFC set to  100.000000
7/23/2010	2:03:30 PM	H2 MFC set to  0.000000
7/23/2010	2:03:30 PM	BCl3 MFC set to  0.000000
7/23/2010	2:03:31 PM	PHl3 MFC set to  0.000000
7/23/2010	2:03:31 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:03:31 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:03:31 PM	Tube furnace set to 0
7/23/2010	2:12:31 PM	Helium valve closed
7/23/2010	2:12:31 PM	H2 valve closed
7/23/2010	2:12:31 PM	BCl3 valve closed
7/23/2010	2:12:31 PM	PH3 valve closed
7/23/2010	2:12:31 PM	SiCl4 pre valve closed
7/23/2010	2:12:31 PM	SiCl4 post valve closed
7/23/2010	2:12:31 PM	Bubbler valve closed
7/23/2010	2:12:31 PM	Main Vac valve opened
7/23/2010	2:12:31 PM	Bypass valve opened
7/23/2010	2:12:31 PM	Helium MFC set to  0.000000
7/23/2010	2:12:31 PM	H2 MFC set to  0.000000
7/23/2010	2:12:31 PM	BCl3 MFC set to  0.000000
7/23/2010	2:12:31 PM	PHl3 MFC set to  0.000000
7/23/2010	2:12:31 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:12:31 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:12:31 PM	Tube furnace set to 0
7/23/2010	2:13:31 PM	H2 valve closed
7/23/2010	2:13:31 PM	BCl3 valve closed
7/23/2010	2:13:31 PM	PH3 valve closed
7/23/2010	2:13:31 PM	SiCl4 pre valve closed
7/23/2010	2:13:31 PM	SiCl4 post valve closed
7/23/2010	2:13:31 PM	Bubbler valve closed
7/23/2010	2:13:31 PM	Helium valve opened
7/23/2010	2:13:31 PM	Main Vac valve opened
7/23/2010	2:13:31 PM	Bypass valve opened
7/23/2010	2:13:31 PM	Helium MFC set to  100.000000
7/23/2010	2:13:31 PM	H2 MFC set to  0.000000
7/23/2010	2:13:31 PM	BCl3 MFC set to  0.000000
7/23/2010	2:13:31 PM	PHl3 MFC set to  0.000000
7/23/2010	2:13:31 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:13:31 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:13:31 PM	Tube furnace set to 0
7/23/2010	2:22:31 PM	Helium valve closed
7/23/2010	2:22:31 PM	H2 valve closed
7/23/2010	2:22:31 PM	BCl3 valve closed
7/23/2010	2:22:31 PM	PH3 valve closed
7/23/2010	2:22:31 PM	SiCl4 pre valve closed
7/23/2010	2:22:31 PM	SiCl4 post valve closed
7/23/2010	2:22:31 PM	Bubbler valve closed
7/23/2010	2:22:31 PM	Main Vac valve opened
7/23/2010	2:22:31 PM	Bypass valve opened
7/23/2010	2:22:31 PM	Helium MFC set to  0.000000
7/23/2010	2:22:31 PM	H2 MFC set to  0.000000
7/23/2010	2:22:31 PM	BCl3 MFC set to  0.000000
7/23/2010	2:22:31 PM	PHl3 MFC set to  0.000000
7/23/2010	2:22:31 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:22:31 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:22:31 PM	Tube furnace set to 0
7/23/2010	2:23:31 PM	H2 valve closed
7/23/2010	2:23:31 PM	BCl3 valve closed
7/23/2010	2:23:31 PM	PH3 valve closed
7/23/2010	2:23:31 PM	SiCl4 pre valve closed
7/23/2010	2:23:31 PM	SiCl4 post valve closed
7/23/2010	2:23:31 PM	Bubbler valve closed
7/23/2010	2:23:31 PM	Helium valve opened
7/23/2010	2:23:31 PM	Main Vac valve opened
7/23/2010	2:23:31 PM	Bypass valve opened
7/23/2010	2:23:31 PM	Helium MFC set to  100.000000
7/23/2010	2:23:31 PM	H2 MFC set to  0.000000
7/23/2010	2:23:31 PM	BCl3 MFC set to  0.000000
7/23/2010	2:23:31 PM	PHl3 MFC set to  0.000000
7/23/2010	2:23:31 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:23:31 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:23:31 PM	Tube furnace set to 0
7/23/2010	2:32:31 PM	Helium valve closed
7/23/2010	2:32:31 PM	H2 valve closed
7/23/2010	2:32:31 PM	BCl3 valve closed
7/23/2010	2:32:31 PM	PH3 valve closed
7/23/2010	2:32:31 PM	SiCl4 pre valve closed
7/23/2010	2:32:31 PM	SiCl4 post valve closed
7/23/2010	2:32:31 PM	Bubbler valve closed
7/23/2010	2:32:31 PM	Main Vac valve opened
7/23/2010	2:32:31 PM	Bypass valve opened
7/23/2010	2:32:31 PM	Helium MFC set to  0.000000
7/23/2010	2:32:31 PM	H2 MFC set to  0.000000
7/23/2010	2:32:31 PM	BCl3 MFC set to  0.000000
7/23/2010	2:32:31 PM	PHl3 MFC set to  0.000000
7/23/2010	2:32:31 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:32:31 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:32:32 PM	Tube furnace set to 0
7/23/2010	2:32:33 PM	Run finished at 2:32 PM
7/23/2010	2:32:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/23/2010	2:49:53 PM	Helium MFC set to  100.000000
7/23/2010	2:49:54 PM	Helium valve opened
7/23/2010	2:54:59 PM	Helium valve closed
7/23/2010	2:55:01 PM	Helium MFC set to  0.000000
7/23/2010	2:55:57 PM	Recipe started at 2:55 PM
7/23/2010	2:55:57 PM	Helium valve closed
7/23/2010	2:55:57 PM	BCl3 valve closed
7/23/2010	2:55:57 PM	PH3 valve closed
7/23/2010	2:55:57 PM	SiCl4 pre valve closed
7/23/2010	2:55:57 PM	SiCl4 post valve closed
7/23/2010	2:55:57 PM	Main Vac valve closed
7/23/2010	2:55:57 PM	Bypass valve closed
7/23/2010	2:55:57 PM	Bubbler valve closed
7/23/2010	2:55:57 PM	H2 valve opened
7/23/2010	2:55:57 PM	Helium MFC set to  0.000000
7/23/2010	2:55:57 PM	H2 MFC set to  500.000000
7/23/2010	2:55:57 PM	BCl3 MFC set to  0.000000
7/23/2010	2:55:57 PM	PHl3 MFC set to  0.000000
7/23/2010	2:55:57 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:55:57 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:55:57 PM	Tube furnace set to 1000
7/23/2010	2:57:17 PM	Helium valve closed
7/23/2010	2:57:17 PM	BCl3 valve closed
7/23/2010	2:57:17 PM	PH3 valve closed
7/23/2010	2:57:17 PM	SiCl4 pre valve closed
7/23/2010	2:57:17 PM	SiCl4 post valve closed
7/23/2010	2:57:17 PM	Main Vac valve closed
7/23/2010	2:57:17 PM	Bypass valve closed
7/23/2010	2:57:17 PM	H2 valve opened
7/23/2010	2:57:17 PM	Bubbler valve opened
7/23/2010	2:57:17 PM	Helium MFC set to  0.000000
7/23/2010	2:57:17 PM	H2 MFC set to  500.000000
7/23/2010	2:57:17 PM	BCl3 MFC set to  0.000000
7/23/2010	2:57:17 PM	PHl3 MFC set to  0.000000
7/23/2010	2:57:17 PM	SiCl4 MFC set to  0.000000
7/23/2010	2:57:17 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	2:57:17 PM	Tube furnace set to 1000
7/23/2010	3:17:17 PM	Helium valve closed
7/23/2010	3:17:17 PM	PH3 valve closed
7/23/2010	3:17:17 PM	Main Vac valve closed
7/23/2010	3:17:17 PM	Bypass valve closed
7/23/2010	3:17:17 PM	H2 valve opened
7/23/2010	3:17:17 PM	BCl3 valve opened
7/23/2010	3:17:17 PM	SiCl4 pre valve opened
7/23/2010	3:17:17 PM	SiCl4 post valve opened
7/23/2010	3:17:17 PM	Bubbler valve opened
7/23/2010	3:17:17 PM	Helium MFC set to  0.000000
7/23/2010	3:17:17 PM	H2 MFC set to  500.000000
7/23/2010	3:17:17 PM	BCl3 MFC set to  35.000000
7/23/2010	3:17:17 PM	PHl3 MFC set to  0.000000
7/23/2010	3:17:17 PM	SiCl4 MFC set to  50.000000
7/23/2010	3:17:17 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	3:17:18 PM	Tube furnace set to 1000
7/23/2010	3:27:18 PM	Helium valve closed
7/23/2010	3:27:18 PM	BCl3 valve closed
7/23/2010	3:27:18 PM	PH3 valve closed
7/23/2010	3:27:18 PM	SiCl4 pre valve closed
7/23/2010	3:27:18 PM	SiCl4 post valve closed
7/23/2010	3:27:18 PM	Main Vac valve closed
7/23/2010	3:27:18 PM	Bypass valve closed
7/23/2010	3:27:18 PM	H2 valve opened
7/23/2010	3:27:18 PM	Bubbler valve opened
7/23/2010	3:27:18 PM	Helium MFC set to  0.000000
7/23/2010	3:27:18 PM	H2 MFC set to  500.000000
7/23/2010	3:27:18 PM	BCl3 MFC set to  0.000000
7/23/2010	3:27:18 PM	PHl3 MFC set to  0.000000
7/23/2010	3:27:18 PM	SiCl4 MFC set to  0.000000
7/23/2010	3:27:18 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	3:27:18 PM	Tube furnace set to 750
7/23/2010	3:47:18 PM	H2 valve closed
7/23/2010	3:47:18 PM	BCl3 valve closed
7/23/2010	3:47:18 PM	PH3 valve closed
7/23/2010	3:47:18 PM	SiCl4 pre valve closed
7/23/2010	3:47:18 PM	SiCl4 post valve closed
7/23/2010	3:47:18 PM	Main Vac valve closed
7/23/2010	3:47:18 PM	Bypass valve closed
7/23/2010	3:47:18 PM	Helium valve opened
7/23/2010	3:47:18 PM	Bubbler valve opened
7/23/2010	3:47:18 PM	Helium MFC set to  500.000000
7/23/2010	3:47:18 PM	H2 MFC set to  0.000000
7/23/2010	3:47:18 PM	BCl3 MFC set to  0.000000
7/23/2010	3:47:18 PM	PHl3 MFC set to  0.000000
7/23/2010	3:47:18 PM	SiCl4 MFC set to  0.000000
7/23/2010	3:47:18 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	3:47:18 PM	Tube furnace set to 0
7/23/2010	4:07:18 PM	Helium valve closed
7/23/2010	4:07:18 PM	H2 valve closed
7/23/2010	4:07:18 PM	BCl3 valve closed
7/23/2010	4:07:18 PM	PH3 valve closed
7/23/2010	4:07:18 PM	SiCl4 pre valve closed
7/23/2010	4:07:18 PM	SiCl4 post valve closed
7/23/2010	4:07:18 PM	Main Vac valve closed
7/23/2010	4:07:18 PM	Bypass valve closed
7/23/2010	4:07:18 PM	Bubbler valve closed
7/23/2010	4:07:18 PM	Helium MFC set to  0.000000
7/23/2010	4:07:18 PM	H2 MFC set to  0.000000
7/23/2010	4:07:18 PM	BCl3 MFC set to  0.000000
7/23/2010	4:07:18 PM	PHl3 MFC set to  0.000000
7/23/2010	4:07:18 PM	SiCl4 MFC set to  0.000000
7/23/2010	4:07:18 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	4:07:18 PM	Tube furnace set to 0
7/23/2010	4:07:18 PM	Run finished at 4:07 PM
7/23/2010	5:00:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/23/2010	5:00:21 PM	Recipe started at 5:00 PM
7/23/2010	5:00:21 PM	Helium valve closed
7/23/2010	5:00:21 PM	H2 valve closed
7/23/2010	5:00:21 PM	BCl3 valve closed
7/23/2010	5:00:21 PM	PH3 valve closed
7/23/2010	5:00:21 PM	SiCl4 pre valve closed
7/23/2010	5:00:21 PM	SiCl4 post valve closed
7/23/2010	5:00:21 PM	Main Vac valve closed
7/23/2010	5:00:21 PM	Bubbler valve closed
7/23/2010	5:00:21 PM	Bypass valve opened
7/23/2010	5:00:21 PM	Helium MFC set to  0.000000
7/23/2010	5:00:21 PM	H2 MFC set to  0.000000
7/23/2010	5:00:21 PM	BCl3 MFC set to  0.000000
7/23/2010	5:00:21 PM	PHl3 MFC set to  0.000000
7/23/2010	5:00:21 PM	SiCl4 MFC set to  0.000000
7/23/2010	5:00:21 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	5:00:21 PM	Tube furnace set to 0
7/23/2010	5:00:59 PM	Helium valve closed
7/23/2010	5:00:59 PM	H2 valve closed
7/23/2010	5:00:59 PM	BCl3 valve closed
7/23/2010	5:00:59 PM	PH3 valve closed
7/23/2010	5:00:59 PM	SiCl4 pre valve closed
7/23/2010	5:00:59 PM	SiCl4 post valve closed
7/23/2010	5:00:59 PM	Bubbler valve closed
7/23/2010	5:00:59 PM	Main Vac valve opened
7/23/2010	5:00:59 PM	Bypass valve opened
7/23/2010	5:00:59 PM	Helium MFC set to  0.000000
7/23/2010	5:00:59 PM	H2 MFC set to  0.000000
7/23/2010	5:00:59 PM	BCl3 MFC set to  0.000000
7/23/2010	5:00:59 PM	PHl3 MFC set to  0.000000
7/23/2010	5:00:59 PM	SiCl4 MFC set to  0.000000
7/23/2010	5:00:59 PM	Bypass solenoid MFC set to  0.000000
7/23/2010	5:00:59 PM	Tube furnace set to 0
7/23/2010	5:00:59 PM	Run finished at 5:00 PM
7/23/2010	5:00:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
